An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability
نویسندگان
چکیده
منابع مشابه
Actuator Design for a High-Speed Large-Range Tip-Tilt-Piston Micro- mirror Array
1 These are both first authors as their contributions to this paper are equal INTRODUCTION This paper presents a new method for the modeling and optimization of actuator performance in a high fill-factor (99%) micromirror array (10,000 1mm 2 mirrors). The high torque output resulting from the optimization enables the mirrors to be driven with three degrees of freedom (DOFs)—tip, tilt, and pisto...
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INTRODUCTION The aim of this paper is to introduce the flexure topology of a new, high fill-factor (99%) micromirror array (10,000 1mm 2 mirrors) that can achieve continuous, closed-loop control of three degrees of freedom (DOFs)—tip, tilt, and piston—over large ranges (>±10 o rotation and >±30μm translation) at high speeds (10’s of kHz). The flexure topology of this array was designed using th...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2019
ISSN: 2072-666X
DOI: 10.3390/mi10050323